The laboratory is equipped with hardware and software tools for the development of innovative devices, sensors, and microsystems for scientific, industrial, and consumer applications, using microelectronic and micro-electro-mechanical (MEMS) technologies. 

Typical activities include: definition of custom fabrication processes, device design and layout drawing, numerical simulation and modeling, electrical and functional characterization. Analog circuit interfaces for sensor signal read-out and processing are also designed, either based on discrete components or integrated in commercial CMOS technologies.

Main instrumentation

• Workstations with design/simulation CAD tools
• Standard and high voltage power supplies
• Pulse and waveform generators
• Oscilloscopes and spectrum analyzer
• LCR meter and semiconductor parameter analyzer
• Electro-optical bench

Contacts

Head

Prof. Lucio Pancheri

Phone of the laboratory: 0461 285349